Aluminum nitride heater

  • 〈 Features 〉

    • Reaching 600°C in 5 seconds! Pure Japan-made high-performance heater

    • Fast heating and fast cooling are possible.

    • Has thermal conductivity close to that of metallic aluminum.

    • Small coefficient of thermal expansion.

    • High electrical insulation.

    • Excellent corrosion resistance.

  • 〈 Feature 〉

    Flexible Surface condition Vacuum compatible
    × ○ ○

    〈 Target for heating 〉

    Piping, container Metal Liquid Gas
    ○ ○ × ○
  • Example of temperature profile

  • Surface temperature distribution

  • 20mm AlN heater

  • Temperature rising characteristics

Specification

  • Maximum operating temperature: 600°C
    Heating element　　　：Tungsten
    Thermal conductivity　　：180 W/m/K or above

  • Thermal expansion coefficient　：4.6ｘ10-6／℃　（30〜800℃）
    Volume resistivity　：1013 Ω/cm or above
    Manufacturable dimensions：130 x 130 mm or Φ 130 mm or less

Hi-Watty Light（Standard goods）

  • 〈 Features 〉

    • Pure Japan-made general-purpose aluminum nitride heater

    • Fast heating and cooling is possible.

    • Low-cost.

    • Short lead time.

  • 〈 Feature 〉

    Flexible Surface condition Vacuum compatible
    ○ ○ ○

    〈 Target for heating 〉

    Piping, container Metal Liquid Gas
    ○ ○ × ○
Heater structure In order to prevent any air layer from remaining inside the heater, integral sintering is performed using our proprietary production method. As a result, we have realized small heaters with large calorific values.
Fast heating The combination of a high-melting point heating element and single-body sintering provides a heater capable of fast heating.
Thermal shock tolerance Thermal shock tolerance is superior to alumina, used in common ceramic heaters.
Temperature distribution By combining the high thermal conductivity of aluminum nitride (AlN) with a heater pattern design based on our know-how, uniform temperature characteristics can be realized.

 

Standard goods
  Voltage (V) Power (W) Power density (W/㎠) Resistance value (at room temperature) Remarks
□5 12 9 36 16  
□12 100 45 30 222  
200 100 70 400  
□9×34 100 70 23 143  
200 70 23 571  
□20 100 100 25 100  
200 100 25 400  
□25 100 150 24 67  
200 600 96 67 100V common
□40 100 200 12.5 50  
200 800 50 50 100V common
□50 100 400 16 25  
200 1600 64 25 100V common

 

Each size heater drawing

Specification

  • Maximum operating temperature: 500 ° C
    Heating element: Tungsten
    Thermal conductivity: 180 W / m · K or more

  • Thermal expansion coefficient: Thermal expansion coefficient 4.8 × 10 -6 / ° C
    Volume resistivity: Volume resistivity 2.6 × 10 14 Ω · cm (25 ° C)
    Usable dimensions: 130 × 130 mm or 130 130 mm or less

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