High efficiency heater for gases.
High purity gas supply/heating for semiconductor/FPD production
Ultra-high purity gas supply/heating for various analysis equipment
Suitable for atmospheric gas supply for heat treatment furnaces.
2、Small size, light weight and high efficiency.
・Small and lightweight, with the smallest size of the main body of □ 80 mm × L 102 mm, and the minimum main body weight of 1.0 kg.
・Making the product into a series, we have a lineup that can be used with a maximum flow rate of 100 L/min. and at up to 300°C.
3、Thermocouple and thermostat are standard inclusions.
・Temperature control and consideration for overheat protection are also standard. Wiring connection is simple.
4、Inlet/outlet fittings can be changed.
・The standard fitting size is UJR 1/4 female.
・Supports inlet/outlet sizes of 1/4 to 1/2.
|Type||S type||M type||L type|
|WEX-S* -2*||WEX-S* -3*||WEX-M* -2*||WEX-M* -3*||WEX-L* -3*|
|Heatable fluid||Inert gas|
|Maximum operating temperature||200℃||300℃||200℃||300℃||300℃|
|Maximum operating pressure||0.5Mpa|
|Standard fitting||UJR "1/4 female||UJR "3/8 Female|
|Gas-contacting material||SUS316L (WEP specification)|
|Leak rate||1 × 1010Pa・㎥/sec Less than|
|Power supply||AC100 or AC200|
|thermocouple||K type class 2|
|thermostat||Disk type||Block type||Disk type||Block type||Block type|
|Main body dimensions（H×W×D）||75×75×98||96×102×128||125.5×100×115||155.5×130×145||178×150×165|
|Body weight||Approximately 1kg||Approximately 1.2kg||Approximately 2kg||Approximately 2.3 kg||Approximately 4kg|
|Connection method||Connector removal||Lead wire 2 m||Connector removal||Lead wire 2 m||Connector removal|