High efficiency heater series for gas heating

Heat exchanger (WEX) S/M/L

  • 〈 Features 〉

    • Ultra high purity gas supply/heating for semiconductor/FPD manufacturing

    • Ultra high purity gas supply/heating for various analyzers

    • Optimal for supplying atmosphere gas for heat treatment furnace

    • S size flow rate 10l~L size flow rate 100l, operating temperature 300°C compatible

  • 〈 Feature 〉

    Flexible Surface condition Vacuum compatible
    × × ×

    〈 Target for heating 〉

    Piping, container Metal Liquid Gas
    × ×
【Heat Exchanger Features】

1、A clean structure using only EP tubes.
・Contact parts such as fittings and piping are all stainless steel (SUS316L).
・The heated gas is heated without touching the heater surface. It is heated in a clean state while being transferred in a clean pipe.

 

2、Small size, light weight and high efficiency.
・Making the product into a series, we have a lineup that can be used with a maximum flow rate of 100 L/min. and at up to 300°C.

 

3、Thermocouple and thermostat are standard inclusions.
・Temperature control and consideration for overheat protection are also standard. Wiring connection is simple.

 

4、Inlet/outlet joints can be changed
・ Standard fitting is UJR 1/4 Female size.
・ It corresponds to the inlet/outlet size of 1/4 to 1/2 size.

 

Specification

TypeS typeM typeL type
WEX-S* -2*WEX-S* -3*WEX-M* -2*WEX-M* -3*WEX-L* -3*
Heatable fluidInert gas
Maximum operating temperature200℃300℃200℃300℃300℃
Rated flow〜10L/min〜50L/min〜100L/min
Rated capacity130W190W400W560W1300W
Maximum operating pressure0.5Mpa
Standard fittingUJR "1/4 femaleUJR "3/8 Female
Gas-contacting materialSUS316L (WEP specification)
Leak rate1 × 1010Pa・㎥/sec Less than
Power supplyAC100 or AC200
thermocoupleK type class 2
thermostatDisk typeBlock typeDisk typeBlock typeBlock type
Main body dimensions(H×W×D)75×75×9896×102×128125.5×100×115155.5×130×145178×150×165
Body weightApproximately 1kgApproximately 1.2kgApproximately 2kgApproximately 2.3 kgApproximately 4kg
Connection methodConnector removalLead wire 2 mConnector removalLead wire 2 mConnector removal
Standard accessories※1※4※2※5※3

※1 Thermo / power connector x 1 K thermocouple connector x 1 Mounting bracket x 1
※2 Thermo / power connector x 1 K Thermocouple connector x 1 Mounting bracket x 2
  • Application example

  • S type drawing

Temperature characteristic example

High efficiency heater series for gas heating

Heat exchanger (WEX) UL

  • 〈 Features 〉

    • UL499 compatible FileNo,E478998

    • Flow rate 10 L/min 200 °C compatible

    • K thermocouple and thermostat standard equipment

  • 〈 Feature 〉

    Flexible Surface condition Vacuum compatible
    × × ×

    〈 Target for heating 〉

    Piping, container Metal Liquid Gas
    × ×

Specification

 
〇WEX-UL-S2-S(UL compatible)

◆Size:98mm×75mm×75mm
◆Operating temperature:200°C
◆Rated flow rate:10L/Min
◆Rated capacity:130W
◆Temperature sensor: K thermocouple
◆Excessive temperature rise prevention: With thermostat
◆Weight:1000g~
◆UL499 compatible FileNo,E478998

High efficiency heater series for gas heating

Heat exchanger (WEX) SS

  • 〈 Features 〉

    • 280g Lightweight and ultra-small gas heater with palm size or less

    • Supports low flow rate 1 to 5 L/min 250 °C

    • K thermocouple, thermostat, exterior insulation standard equipment

  • 〈 Feature 〉

    Flexible Surface condition Vacuum compatible
    × × ×

    〈 Target for heating 〉

    Piping, container Metal Liquid Gas
    × ×

Specification

 
〇midget-type WEX₋SS

◆Size:70mm×32mm×42mm
※Excluding heat insulation materials and piping
◆Operating temperature:250°C
◆Rated flow rate:1~5L/Min
◆Rated capacity:140W(AC100Vor200V)
◆Temperature sensor:K thermocouple
◆Overheating prevention:With thermostat
◆Exterior insulation:Mantle(Stop with magic tape)
◆weight:280g

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