Contracted deposition service for experiments and R&D

We started the contracted deposition service using ALD deposition equipment at our Sagamihara Plant. We will assist with the deposition on small diameter samples using organic metal materials of your choice. We will meet all your needs, such as live demonstrations in your presence, using your desired recipes, and comparative evaluations using desired parameters. We also perform evaluation tasks, such as film thickness measurement and film quality analysis after the film deposition. The deposition samples can be brought in by the customers or provided by us. We also perform small-lot productions on a regular basis, so feel free to contact us.

• We accept requests for depositing various oxide films and nitride films.
  (Al₂O₃、TiO₂、ZrO₂、HfO₂，TiN等)
  ※We are sequentially expanding film deposition species such as metal films. Please contact us.
• We offer various TEG.
  (Bare wafer, L/S AR15/AR20 TSV, etc.)
  We also sell single items.
• Films on substrate sizes of up to 2 inches can be produced. A 6-inch system will also be installed in time, so please inquire for the details.
• We also offer analysis and evaluation services (film thickness measurement, ellipsometry, SEM observation, TEM observation, FTIR, XPS, etc.) after the film deposition.
• Please contact our sales office for details.

• Our engineers will respond and provide support with recipe design and parameter setting.

• Please feel free to bring in deposition samples. On request, it is also possible to use our stock test wafer chips and L/S pattern samples (for a fee).

• We also allow precursors to be brought in. Depending on the bottle specifications, there is a possibility that they can not be installed, so please be sure to disclose the specifications such as the bottle size in advance when carrying them in.

• It is also possible to use our stocked precursors. In addition, we can arrange precursors that are not in stock with us, so please contact us.

• Depending on the content of the desired evaluation, we will add modifications to the flow, auxiliary equipment, or additional equipment, etc. As this service is quoted each time according to the modification contents, please inquire with us.

• We also perform film deposition evaluations such as SEM, TEM, STEM analysis, spectroscopic ellipsometer, EDS, XRR, XRD, and FT-IR.

• We also perform small-lot productions on a regular basis.

• Please contact our sales department for inquiries regarding the contract costs.