Bake unit

Unit Product

    • We will offer proposals according to applications such as single-wafer and multistage processing type.

    • We design and manufacture everything from manual type for testing and research, to units with automatic carrier for mass production.

    • Please inquire about wafer size, operating temperature, uniformity, etc.

  • Feature

    • Flexible
    • Surface condition
    • Vacuum compatible

    Target for heating

    • Piping, container
    • Metal
    • Liquid
    • Gas

Gas piping unit

Unit Product

    • Streamlined production in a cleanroom (class 100, 1000)

    • Process gas supply line for CVD, etching and ashing equipment, vent line design and manufacturing.

    • Rich back data for welding of various piping materials and parts.

    • We also respond to short lead time and small volume production requests.


Manufacturing environment clean room class 100/1000
Corresponding parts maker Fujikin, Swagelok, KITZ SSC, Tabais Tec, CKD and many more
Piping grade used SUS316L BA , EP (WEP)
Corresponding pipe diameter φ1 / 8, φ1 / 4, φ3 / 8, φ1 / 2 inch
Major equipment Automatic welding machine
shield gas unit
Edge processing machine
He leak detector
Particle counter
Mass flow checker
Tube cutter
Fine cutter

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