〈 Features 〉
We will offer proposals according to applications such as single-wafer and multistage processing type.
We design and manufacture everything from manual type for testing and research, to units with automatic carrier for mass production.
Please inquire about wafer size, operating temperature, uniformity, etc.
Flexible | Surface condition | Vacuum compatible |
○ | ○ | ○ |
Piping, container | Metal | Liquid | Gas |
○ | ○ | ○ | ○ |