Bake unit

  • 〈 Features 〉

    • We will offer proposals according to applications such as single-wafer and multistage processing type.

    • We design and manufacture everything from manual type for testing and research, to units with automatic carrier for mass production.

    • Please inquire about wafer size, operating temperature, uniformity, etc.

  • 〈 Feature 〉

    FlexibleSurface conditionVacuum compatible

    〈 Target for heating 〉

    Piping, containerMetalLiquidGas

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