We will offer proposals according to applications such as single-wafer and multistage processing type.
We design and manufacture everything from manual type for testing and research, to units with automatic carrier for mass production.
Please inquire about wafer size, operating temperature, uniformity, etc.
Streamlined production in a cleanroom (class 100, 1000)
Process gas supply line for CVD, etching and ashing equipment, vent line design and manufacturing.
Rich back data for welding of various piping materials and parts.
We also respond to short lead time and small volume production requests.
|Manufacturing environment||clean room class 100/1000|
|Corresponding parts maker||Fujikin, Swagelok, KITZ SSC, Tabais Tec, CKD and many more|
|Piping grade used||SUS316L BA , EP (WEP)|
|Corresponding pipe diameter||φ1 / 8, φ1 / 4, φ3 / 8, φ1 / 2 inch|
|Major equipment||Automatic welding machine|
|shield gas unit|
|Edge processing machine|
|He leak detector|
|Mass flow checker|