Gas supply unit
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〈 Features 〉
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Streamlined production in a cleanroom (class 100, 1000)
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Process gas supply line for CVD, etching and ashing equipment, vent line design and manufacturing.
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Rich back data for welding of various piping materials and parts.
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We can also manufacture welded pipes and welded pipes for special gases.
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We also respond to short lead time and small volume production requests.
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Specification
| Manufacturing environment | clean room class 100/1000 |
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| Corresponding parts maker | Fujikin, Swagelok, KITZ SSC, Tabais Tec, CKD and many more |
| Piping grade used | SUS316L BA , EP (WEP) |
| Corresponding pipe diameter | φ1 / 8, φ1 / 4, φ3 / 8, φ1 / 2 inch |
| Major equipment | Automatic welding machine |
| shield gas unit | |
| Edge processing machine | |
| He leak detector | |
| Particle counter | |
| Mass flow checker | |
| Tube cutter | |
| Fine cutter |