High precision hot plate for vacuum

  • 〈 Features 〉

    • High-precision control of in-plane temperature distribution.

    • We respond to consultation regarding the shape, size, etc.

    • Supports up to 400°C (AI plate).

  • 〈 Feature 〉

    Flexible Surface condition Vacuum compatible
    × ×

    〈 Target for heating 〉

    Piping, container Metal Liquid Gas
Example of use

Integrated production in a clean room (class 100, 1000)
Process gas supply line for CVD, etching and ashing equipment, vent line design and manufacturing
Abundant back data corresponding to welding of various piping materials and parts
We can also manufacture welded pipes and welded pipes for special gases
We also support quick delivery and small volume production

Usage notes
  • 1. When installing the heater, wipe off the oil and dirt on the heated surface, and mount it so that the adhesive surface does not become an air pool.
  • 2. The heater temperature changes depending on the operating conditions (operating temperature etc). If the heater surface temperature may exceed 200 ° C, control the heater surface temperature before use.

High-Precision Hot Plate for Atmospheric Pressure

  • 〈 Features 〉

    • Light weight and low power consumption compared to the heater-unified type.

    • Can achieve a high-precision distribution for even FPD G8 size through a divided design.

    • Supports up to 400°C.

  • 〈 Feature 〉

    Flexible Surface condition Vacuum compatible
    × ×

    〈 Target for heating 〉

    Piping, container Metal Liquid Gas
Example of use
  • 1. Baking of resist, color filter etc. (FEOL)
  • <2>. Inspection device of prober etc. (BEOL)
  • 3. For heating mask glass
Usage notes
  • 1. When installing the heater, wipe off the oil and dirt on the heated surface, and mount it so that the adhesive surface does not become an air pool.
  • 2. The heater temperature changes depending on the operating conditions (operating temperature etc.). If the heater surface temperature may exceed 200 ° C, control the heater surface temperature before use.

 

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