〈 Features 〉
Light weight and low power consumption compared to the heater-unified type.
Can achieve a high-precision distribution for even FPD G8 size through a divided design.
Supports up to 400°C.
Flexible | Surface condition | Vacuum compatible |
× | ○ | × |
Piping, container | Metal | Liquid | Gas |
○ | ○ | ○ | ○ |
〈 Features 〉
High-precision control of in-plane temperature distribution.
We respond to consultation regarding the shape, size, etc.
Supports up to 400°C (AI plate).
Flexible | Surface condition | Vacuum compatible |
× | ○ | × |
Piping, container | Metal | Liquid | Gas |
○ | ○ | ○ | ○ |
Integrated production in a clean room (class 100, 1000)
Process gas supply line for CVD, etching and ashing equipment, vent line design and manufacturing
Abundant back data corresponding to welding of various piping materials and parts
We can also manufacture welded pipes and welded pipes for special gases
We also support quick delivery and small volume production