High precision hot plate for vacuum

Hot Plate

    • High-precision control of in-plane temperature distribution.

    • We respond to consultation regarding the shape, size, etc.

    • Supports up to 400°C (AI plate).

  • Feature

    • Flexible×
    • Surface condition×
    • Vacuum compatible

    Target for heating

    • Piping, container
    • Metal
    • Liquid
    • Gas
Example of use
  • 1、CVD
  • 2、ETCHING
  • 3、ASHING
Usage notes
  • 1. When installing the heater, wipe off the oil and dirt on the heated surface, and mount it so that the adhesive surface does not become an air pool.
  • 2. The heater temperature changes depending on the operating conditions (operating temperature etc). If the heater surface temperature may exceed 200 ° C, control the heater surface temperature before use.

 

High-Precision Hot Plate for Atmospheric Pressure

Hot Plate

    • Light weight and low power consumption compared to the heater-unified type.

    • Can achieve a high-precision distribution for even FPD G8 size through a divided design.

    • Supports up to 400°C.

  • Feature

    • Flexible×
    • Surface condition×
    • Vacuum compatible×

    Target for heating

    • Piping, container
    • Metal
    • Liquid
    • Gas
Example of use
  • 1. Baking of resist, color filter etc. (FEOL)
  • <2>. Inspection device of prober etc. (BEOL)
  • 3. For heating mask glass
Usage notes
  • 1. When installing the heater, wipe off the oil and dirt on the heated surface, and mount it so that the adhesive surface does not become an air pool.
  • 2. The heater temperature changes depending on the operating conditions (operating temperature etc.). If the heater surface temperature may exceed 200 ° C, control the heater surface temperature before use.

 

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