High efficiency heater series for gas heating
Heat exchanger (WEX) S/M/L
〈 Features 〉
Ultra high purity gas supply/heating for semiconductor/FPD manufacturing
Ultra high purity gas supply/heating for various analyzers
Optimal for supplying atmosphere gas for heat treatment furnace
S size flow rate 10l~L size flow rate 100l, operating temperature 300°C compatible
〈 Feature 〉
Flexible Surface condition Vacuum compatible × × × 〈 Target for heating 〉
Piping, container Metal Liquid Gas ○ × × ○
【Heat Exchanger Features】
1、A clean structure using only EP tubes.
・Contact parts such as fittings and piping are all stainless steel (SUS316L).
・The heated gas is heated without touching the heater surface. It is heated in a clean state while being transferred in a clean pipe.
2、Small size, light weight and high efficiency.
・Making the product into a series, we have a lineup that can be used with a maximum flow rate of 100 L/min. and at up to 300°C.
3、Thermocouple and thermostat are standard inclusions.
・Temperature control and consideration for overheat protection are also standard. Wiring connection is simple.
4、Inlet/outlet joints can be changed
・ Standard fitting is UJR 1/4 Female size.
・ It corresponds to the inlet/outlet size of 1/4 to 1/2 size.
Specification
| Type | S type | M type | L type | ||
|---|---|---|---|---|---|
| WEX-S* -2* | WEX-S* -3* | WEX-M* -2* | WEX-M* -3* | WEX-L* -3* | |
| Heatable fluid | Inert gas | ||||
| Maximum operating temperature | 200℃ | 300℃ | 200℃ | 300℃ | 300℃ |
| Rated flow | 〜10L/min | 〜50L/min | 〜100L/min | ||
| Rated capacity | 130W | 190W | 400W | 560W | 1300W |
| Maximum operating pressure | 0.5Mpa | ||||
| Standard fitting | UJR "1/4 female | UJR "3/8 Female | |||
| Gas-contacting material | SUS316L (WEP specification) | ||||
| Leak rate | 1 × 1010Pa・㎥/sec Less than | ||||
| Power supply | AC100 or AC200 | ||||
| thermocouple | K type class 2 | ||||
| thermostat | Disk type | Block type | Disk type | Block type | Block type |
| Main body dimensions（H×W×D） | 75×75×98 | 96×102×128 | 125.5×100×115 | 155.5×130×145 | 178×150×165 |
| Body weight | Approximately 1kg | Approximately 1.2kg | Approximately 2kg | Approximately 2.3 kg | Approximately 4kg |
| Connection method | Connector removal | Lead wire 2 m | Connector removal | Lead wire 2 m | Connector removal |
| Standard accessories | ※1 | ※4 | ※2 | ※5 | ※3 |
※1 Thermo / power connector x 1 K thermocouple connector x 1 Mounting bracket x 1
※2 Thermo / power connector x 1 K Thermocouple connector x 1 Mounting bracket x 2
Application example
S type drawing
Temperature characteristic example
High efficiency heater series for gas heating
Heat exchanger (WEX) SS
〈 Features 〉
280g Lightweight and ultra-small gas heater with palm size or less
Supports low flow rate 1 to 5 L/min 250 °C
K thermocouple, thermostat, exterior insulation standard equipment
〈 Feature 〉
Flexible Surface condition Vacuum compatible × × × 〈 Target for heating 〉
Piping, container Metal Liquid Gas ○ × × ○
Specification | |
| 〇midget-type WEX₋SS | |
◆Size：70mm×32mm×42mm |
High efficiency heater series for gas heating
Heat exchanger (WEX) UL
〈 Features 〉
UL499 compatible FileNo,E478998
Flow rate 10 L/min 200 °C compatible
K thermocouple and thermostat standard equipment
〈 Feature 〉
Flexible Surface condition Vacuum compatible × × × 〈 Target for heating 〉
Piping, container Metal Liquid Gas ○ × × ○
Specification | |
| 〇WEX-UL-S2-S(UL compatible) | |
◆Size:98mm×75mm×75mm |