Aluminum nitride heater
〈 Features 〉
Reaching 600°C in 5 seconds! Pure Japan-made high-performance heater
Fast heating and fast cooling are possible.
Has thermal conductivity close to that of metallic aluminum.
Small coefficient of thermal expansion.
High electrical insulation.
Excellent corrosion resistance.
〈 Feature 〉
Flexible Surface condition Vacuum compatible × ○ ○ 〈 Target for heating 〉
Piping, container Metal Liquid Gas ○ ○ × ○
Example of temperature profile
Surface temperature distribution
20mm AlN heater
Temperature rising characteristics
Specification
- Maximum operating temperature: 600°C
Heating element ：Tungsten
Thermal conductivity ：180 W/m/K or above - Thermal expansion coefficient ：4.6ｘ10-6／℃ （30〜800℃）
Volume resistivity ：1013 Ω/cm or above
Manufacturable dimensions：130 x 130 mm or Φ 130 mm or less
Hi-Watty Light（Standard goods）
〈 Features 〉
Pure Japan-made general-purpose aluminum nitride heater
Fast heating and cooling is possible.
Low-cost.
Short lead time.
〈 Feature 〉
Flexible Surface condition Vacuum compatible ○ ○ ○ 〈 Target for heating 〉
Piping, container Metal Liquid Gas ○ ○ × ○
| Heater structure | In order to prevent any air layer from remaining inside the heater, integral sintering is performed using our proprietary production method. As a result, we have realized small heaters with large calorific values. |
|---|---|
| Fast heating | The combination of a high-melting point heating element and single-body sintering provides a heater capable of fast heating. |
| Thermal shock tolerance | Thermal shock tolerance is superior to alumina, used in common ceramic heaters. |
| Temperature distribution | By combining the high thermal conductivity of aluminum nitride (AlN) with a heater pattern design based on our know-how, uniform temperature characteristics can be realized. |
Standard goods
| Voltage (V) | Power (W) | Power density (W/㎠) | Resistance value (at room temperature) | Remarks | |
|---|---|---|---|---|---|
| □5 | 12 | 9 | 36 | 16 | |
| □12 | 100 | 45 | 30 | 222 | |
| 200 | 100 | 70 | 400 | ||
| □9×34 | 100 | 70 | 23 | 143 | |
| 200 | 70 | 23 | 571 | ||
| □20 | 100 | 100 | 25 | 100 | |
| 200 | 100 | 25 | 400 | ||
| □25 | 100 | 150 | 24 | 67 | |
| 200 | 600 | 96 | 67 | 100V common | |
| □40 | 100 | 200 | 12.5 | 50 | |
| 200 | 800 | 50 | 50 | 100V common | |
| □50 | 100 | 400 | 16 | 25 | |
| 200 | 1600 | 64 | 25 | 100V common |
Each size heater drawing
- □5㎜ drawing：5Hi-Watty sensor with external view（PDF：69KB）
- □12mm drawing：12Hi-WattyLight sensor with external view（PDF：69KB）
- □12mm drawing：12Hi-WattyLight sensor with external view（PDF：69KB）
- □9×34㎜ drawing：9x34Hi-WattyLight sensor with external view（PDF：68KB）
- □9×34㎜ drawing：9x34Hi-WattyLight sensor with external view（PDF：67KB）
- □20㎜ drawing：20Hi-WattyLight sensor with external view（PDF：68KB）
- □20㎜ drawing：20Hi-WattyLight sensor with external view（PDF：68KB）
- □25㎜ drawing：25Hi-WattyLight sensor with external view（PDF：71KB）
- □40㎜ drawing：40Hi-WattyLight sensor with external view（PDF：71KB）
- □50㎜ drawing：50Hi-WattyLight sensor with external view（PDF：71KB）
Specification
- Maximum operating temperature: 500 ° C
Heating element: Tungsten
Thermal conductivity: 180 W / m · K or more - Thermal expansion coefficient: Thermal expansion coefficient 4.8 × 10 -6 / ° C
Volume resistivity: Volume resistivity 2.6 × 10 14 Ω · cm (25 ° C)
Usable dimensions: 130 × 130 mm or 130 130 mm or less